Metal Line Sheet Resistance

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Metal line sheet resistance.

Sheet resistance also known as surface resistance or surface resistivity is a common electrical property used to characterise thin films of conducting and semiconducting materials. ρ is the resistivity of the conductor in ω m. Specially etch depth is very sensitive to the change of. A is the cross sectional area in metres.

Compute the sheet resistance of a 0 22 µm thick cu wire in a 65 nm process. It is a measure of the lateral resistance through a thin square of material i e. Examples of these processes are. Ss shet rrl w 11 the contact resistance rc can then be calculated from ohm s law.

It is commonly used to characterize materials made by semiconductor doping metal deposition resistive paste printing and glass coating. For example this property is critical in the creation of high efficiency perovskite photovoltaic devices where low sheet resistance materials are needed to extract charge. Capacitance of a line without neighbors can be approximated as. Doped semiconductor regions and the resistors that are screen printed onto the substrates of thick film hybrid microcircuits.

The values for ρ are from crc handbook of chemistry and physics 1st student edition 1998 page f 88 and are for high purity elements at 20 c. The dc resistance of a conductor is calculated using the equation where. Sheet resistance often called sheet resistivity is a measure of resistance of thin films that are nominally uniform in thickness. Sheet resistance or surface resistivity is an important property of many materials quantifying the ability for charge to travel along uniform thin films.

Therefore to form metal lines with the stable sheet resistance it is necessary to stabilize these variables. L is the length in metres. Modern processes use 6 10 metal layers m1. The resistance between opposite sides of a square.

If the spacing between the probe points is constant and the conducting film thickness is less than 40 of the spacing and the edges of the film are more than 4 times the spacing distance from the measurement point the average resistance of the film or the sheet resistance is given by. Rs 4 53 x v i.